The advantages and limitations of aluminum metallization are reviewed and compared with other systems used . Metallization system properties of particular importance are summarized, including initial physical and chemical properties of the system which define potential performance and reliability considerations. Recently available knowledge of aluminum metallization process technology and of metallization-related failure mechanisms is reviewed, and new results of experimental studies are presented.

METALLIZZAZIONE IN CRESCITA

PAPETTI, Patrizia
2000

Abstract

The advantages and limitations of aluminum metallization are reviewed and compared with other systems used . Metallization system properties of particular importance are summarized, including initial physical and chemical properties of the system which define potential performance and reliability considerations. Recently available knowledge of aluminum metallization process technology and of metallization-related failure mechanisms is reviewed, and new results of experimental studies are presented.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11580/7816
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